X-ray tube (Cu, Mo, Co, ...) with 0.04 x 12 mm2 long-fine focus or 0.4 x 0.4 mm2 point focus
sample holder: fixed, Ø = 150 mm
scintillation detector
beam divergence: Δθ < 0.02 °
use of Ni/C - Goebel mirror for: - monochromization and suppression of fluorescence radiation - suppression of Cu-Kß radiation - simple adjustment and short measuring times for parallel beam geometry
Application
X-ray reflectometry at thin layer systems to determine thickness, roughness and density
X-ray diffractometry at powders and polycrystalline layers to analyze phases with respect to quantity and quality