5 Scanning electron microscopes, 3 field emission instruments, 2 W cathode instruments with:
- Ultra-high resolution down to 0.7 nm, optimized for high beam currents
- Imaging with in-lens detectors, detectors for secondary electrons and backscattered electrons, STEM
- 4 EDX systems; 2 EBSD systems, optimized for high resolutions and high count rates
- Transfer system for sample handling under exclusion of air
- Possibility for low vacuum operation (Environmental SEM)
- In-situ deformation module
Application
- High resolution characterization of surface morphology
- Microscopic and nanoscale microstructural analysis (grains, phases, 2D and 3D lattice defects)
- High resolution analysis of thin films and modified edge layers
- Fractographic evaluations
- Chemical composition determination, including light elements (Be, B, C, N, O)
- 3D analysis of materials, tomography and 3D reconstructions; each combinable with EDX and EBSD analyses