Fraunhofer Institute for Material and Beam Technology IWSCoating technologies and thin film anaytics
In IWS various coating technologies are available for the development of nanometer thin films for EUV and X-ray mirrors. Depending on the materials that have to be coated and depending on the properties of the optics, different technologies are used:
For a successful development of coating processes appropriate analytical techniques and tools are mandatory. The following information has to be determined:
- layer thickness and densities
- microstructure of the layers
- surface roughness
- reflection spectra, reflectance values
- internal stress of the coatings
- figure of optical surfaces