Fraunhofer Institute for Material and Beam Technology IWSIn the field of gas and particle characterization, the focus is on multi-gas analysis and trace gas detection. Target applications for the identification and quantitative analysis of substances and compounds are the evaluation of chemical processes, gas atmospheres and the substance-specific penetration or breakthrough behavior of functional materials.
Gas and particle characterization
Multi gas analysis
Principle of the long-term stable, free from particle contaminations, in-situ characterization of multi gas atmospheres
The time-resolved, in-situ detection of different gas species with infra red spectroscopic methods is a well suited, universal characterization device to understand chemical gas phase processes.
The determination of temporal concentrations with detection limits usually in ppm range reveals knowledge about the gas- and exhaust compositions, which emerge during CVD processes. Such processes are, e.g., coating and etching processes in the semi-conducting and photovoltaic industry, sintering processes or the monitoring of gas mixtures.
Trace gas detection
Multi reflection cell with a laser diode spectrometer for the trace gas detection
The highly sensitive trace gas detection, basing on laser diode spectroscopy, reveals significant information about the presence of specific gases. Especially, critical species, such as humidity, can be detected as impurities in ultra clean gases with a detection limit within the ppb range.
Combined with custom-tailored optical systems, the laser diode spectroscopy enables the characterization of the permeation behavior, e.g. of foils. These measurements deliver reliable values for the forecasting of service life for, e.g., barrier sealed LEDs. Such a precision could not be realized so far.
Aerosol analytics
Nano particle distribution during laser structuring or CVD process
The scientists of the group “process monitoring” especially focus their activities on the increased interest, attracted by nano particles. They deal with questions concerning the particulate emission behavior, e.g., laser ablation or chemical coating processes or research on the evaluation of filtered gas atmospheres.